KLA SP1 PART
| S.NO | PRODUCT PICTURE | PART NUMBER | DESCRIPTION | NOTE |
| 1 |
 |
0092493-001 | PMT tube, to be used in normal and oblique beam path | Can be used on SP2 tools as well Several on stock all the time |
| 2 |
 |
0060463-000-P | AutoCal Pin for SP1-TBI use | Pin only, complete assembly available soon |
| 3 |
 |
0060463-000 | AutoCal Pin assy for SP1-TBI use | Assembly |
| 4 |
 |
0060464-000-P | AutoCal Pin for SP1-DLS use | Pin only, complete assembly available soon |
| 5 |
 |
0060464-000 | AutoCal Pin assy for SP1-DLS use | Assembly |
| 6 |
 |
535052 | Autozero Mirror for SP1-TBI/DLS use | Part of the AutoCal pin assembly |
| 7 |
 |
chuck version with UHMW rest 0023889-000 | 150/200mm chuck, UHMW rest, TBI and classic | Original KLA supplied parts |
| 8 |
 |
chuck version with ceramic rest 0023889-000-A | 150/200mm chuck, ceramic rest,TBI and classic | Improved version with ceramic rest, for better grip of the wafer surface under vacuum |
| 9 |
 |
508250-P | BPS pin | Beam position system mirror, pin only |
| 10 |
 |
508250 | BPS pin assembly | Beam positioner system mirror and its holder assembly |
| 11 |
 |
0018134-000 | PBSC Assembly for SP1- DLS | Polarized beam splitter assembly, optical bonded beam splitter for high power |
| 12 |
 |
0018134-000-R | PBSC assembly for SP1- DLS, refurbishment | Reduced pricing if customer can return used assembly. The main part (beam splitter cube) will be replaced and pre |
| 13 |
 |
536091 | PBSC Assembly for SP1-TBI | Polarized beam splitter assembly, optical bonded beam splitter for high power |
| 14 |
 |
536091-R | PBSC assembly for SP1-TBI refurbishment | Reduced pricing if customer can return used assembly. The main part (beam splitter cube) will be replaced and pre |
| 15 |
 |
349437 | Isolator for SP1-TBI and DLS | Optical isolator for protecting of the tools light source. Own development, proved performance by end customers around the world |
| 16 |
 |
349437-R | Isolator for SP1-TBI and DLS,refurbishment | Reduced pricing if customer can return used assembly. The main optical parts will be replaced and pre aligned. Housing can show scratches and maylooks old colored. |
| 17 |
 |
0064460-000 | HWP assembly of the SP1-TBI/DLS | 1:1 copy of the OEM part, proved performance by end customers |
| 18 |
 |
0064460-000-R | HWP assembly of the SP1-TBI/DLS refurbishmen | Reduced pricing if customer can return used assembly. The main optical parts will be replaced and pre aligned. Housing can show scratches and may looks old colored. |
| 19 |
 |
0016391-000 | Bright field laser for SP1-DLS | Pre aligned HeNe laser, option in some SP1-DLS tools |
| 20 |
 |
0014703-000 | Bright field laser power supply | 1:1 replacement, plug-and-play |
| 21 |
 |
Artus plastic shim stock | has an own thickness. Used to align optical parts in the beam path by height compensation | |
| 22 |
 |
C Grease | C-Grease: the fine grease for precision mechanics lubrication like on thrust spindles | |
| 23 |
 |
Targets for laser alignment | Target sets for SurfScan and SP1-TBI/DLS tools | |
| 24 |
 |
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| 25 |
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| 26 |
 |
HeNe laser for ASML Stepper | We do reverse engineering to customer needs If you are looking for obsolete optics or assemblies, please ask us for assistance Our part list will be enlarged all the time. If you are looking for an obsolete part not shown on those slides, please ask us for availability Here are some examples for assemblies we have done before | |
| 27 |
 |
8 axis manipulator for microscope use | ||
| 28 |
 |
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| 29 |
 |
Polarization turning assembly for microscope use | ||
| 30 |
 |
HeNe lasers for SurfScan tools | ||
| 31 |
 |
Turn-out mover for polarization turning assy |