Chiller
Chiller Overhaul AMATO
- Overhaul part change
- Filter
- Feather Wheel
- Hose
- Motor and pump
- Test item
- Filter
- Feather Wheel
- Hose
- Motor and pump
- Other item may need to change
- Pressure gauge
- Thermocouple
- Receptivity sensor
- Pump
- Fitting
- Shut off valve
- Flow meter
AMAT 0
Steelhead
| System | CVD |
| Part Name | Steelhead chiller |
| Service | Overhaul |
| Maker | Steelhead |
| System | CVD |
| Part Name | AMAT 0 |
| Service | Overhaul |
| Maker | AMAT |
Neslab
SMC
| System | CVD |
| Part Name | Neslab chiller |
| Service | Overhaul repair and test |
| Maker | Neslab |
| System | CVD, Etch |
| Part Name | SMC chiller |
| Service | Overhaul repair and test |
| Maker | SMC |
Replacement
Before
After
Before
After
Before
After
Before
After